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期刊简介
- Journal of Micro/Nanopatterning, Materials, and Metrology (JM3)《微/纳米图案化，材料与计量学期刊》（季刊）. The Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) publishes peer-reviewed papers on the core enabling technologies that address the patterning needs of the electronics industry. Formerly the Journal of Micro/Nanolithography, MEMS, and MOEMS, the journal’s key subject areas include the science, development, and practice of lithographic, computational, etch, and integration technologies. In this context the electronics industry includes but is not limited to integrated circuits and multichip modules, and advanced packaging with features in the submicron regime.
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基本信息
- 期刊名称：Journal of Micro/Nanopatterning, Materials, and Metrology (JM3) （或：JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3）《微/纳米图案化，材料与计量学期刊》（原：Journal of Micro/Nanolithography, MEMS, and MOEMS）
- 主管单位：《微/纳米图案化，材料与计量学期刊》
- 主办单位：J MICRO-NANOPATTERN
- 国内刊号：
- 国际刊号：ISSN 1932-5150；EISSN 2708-8340
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- 出刊日期：http://www.spie.org
- 期刊定价：0
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- 邮发代码：3区
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- 所在省区：美国
- 邮政编码：
- 联系地址：SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS , 1000 20TH ST, PO BOX 10, BELLINGHAM, USA, WA, 98225
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投稿信息
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- 审 稿 费：否
- 稿费：否
- 本刊可发：
- 特殊属性：英语
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联系方式
- 投稿网址：https://jm3.msubmit.net/
- 官网网址：https://www.spiedigitallibrary.org/journals/journal-of-micro-nanopatterning-materials-and-metrology/author-guidelines#navBarAnchor
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